FESEM

Image of the Instrument
Image of the Instrument

Technical Specification

SOURCE OF ELECTRON FEG Source
OPERATIONAL ACCELERATING VOLTAGE 200 V-30 KV
RESOLUTION
@30KV@HIGH VACUUM CONDITIONS1.2 nm
@30KV@LOW VACUUM CONDITIONS3.0 nm

DETECTORS

  1. EVERHART-THORNLEY DETECTOR FOR SECONDARY ELECTRONS IN HIGH VACUUM.
  2. GSED FOR PRESSURES UP TO 2600kPa IN ESEM MODE OPERATION.
  3. LARGE FIELD SECONDARY ELECTRON DETECTOR FOR LOW VACUUM OPERATION.
  4. BACK SCATTERED ELECTRON DETECTOR IN HIGH VACUUM MODE IMAGING.

Fields of Research

  1. FESEM IMAGING WITH HIGH RESOLUTION AND HIGH CONTRAST.
  2. CHEMICAL ANALYSIS (EDAX).
  3. INVESTIGATIONS OF NON –CONDUCTIVE SPECIMENS UNDER LOW–VACUUM CONDITIONS.
  4. INVESTIGATIONS OF WET SAMPLES AT PRESSURES UP TO 2600 Pa UNDER ESEM MODE.