Operating Voltage(Electron & Ion Beam) up to 30kV
10nm
The Dual Beam SEM/FIB equipment (FEI Helios 600) is composed of an electron coloum and an Ion coloum, the triangle between the two coloum is 52°.The The eccentric stage is capable of moving the sample orthogonal to one or other of the two beams, gas Injection (Inejcted needle of a Platinum (PT)- based precursor is shown here Blue line) assist milling or to make located deposition . Along with Pt Gas injection system, Tungsten gas Injection system and SIOX Insulation deposition systems are also attached.
Integration and fabrication Nano-devices
Nano Science & Nanotechnology
Internal user (S.N. Bose National centre for basic sciences) :
Users are getting slot according to their requisition Slip which fully signed by their Supervisor. Last working day of every week user note their slot time through mail or chart at Notice Board.