HELIOS FIB DUAL BEAM SYSTEM (Focused Ion Beam)
  

Instrument Details

  
Make
: FEI
Model
: D-440
Specification
:

Operating Voltage(Electron & Ion Beam) up to 30kV

10nm

HELIOS FIB DUAL BEAM SYSTEM (Focused Ion Beam)
  

Working Principles

  

 The Dual Beam SEM/FIB equipment (FEI Helios 600) is composed of an electron coloum and an Ion coloum, the triangle between the two coloum is 52°.The The eccentric stage is capable of moving the sample orthogonal to one or other of the two beams, gas Injection (Inejcted needle of a Platinum (PT)- based precursor is shown here Blue line) assist milling or to make located deposition . Along with Pt Gas injection system, Tungsten gas Injection system and SIOX Insulation deposition systems are also attached.
 
The image shows a diagram of electron and ion beams in focused ion beam microscopy, with SEM, Pt, FIB, and Ga+ labels and a 52° angle indicated.                                                                           

 

 Schematic diagram of scanning electron microscope components showing electron source, condenser lens, scan unit, deflection system, final lens, detection unit and specimen arrangement.

Technical Characteristic

:

  1. Elstar UHR immersion lens FESEM column :


    Electronics scanning.
    Constant Power lens Technology
    Operating (probe)Current and Voltage: 5.4pA-22nA,  1kV-30kV

  2. Ga Ion Coloum:


    Galium Ion Source
    Landing Voltage 0-30kV
    Ion Beam Current and Voltage: 1.3pA-22nA,0kV-30 kV

  3. Detectors:


    ETD( Everhart-Thornley SD Detector)
    TLD (Elster-in-lens secondary Detector)

  4. Gas Injection System:


    Platinum Deposition
    Insulation Deposition(SIOx)
    Enhanced etch (Carbon)
    Tungsten Deposition.

  5. Others:


    E-Beam and Ion Beam Lithography (NAVITY).
  

Applications

  

    Integration and fabrication Nano-devices

    Nano Science & Nanotechnology     
    
  

User Instructions

  
       

  1. Internal user (S.N. Bose National centre for basic sciences) :
                  Users are getting slot according to their requisition Slip which fully signed by their Supervisor. Last  working day of every week user note their slot time through mail or chart at Notice Board.

  

Contact Us

   

033 2335 5706/5707/5708