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A profilometer is a measuring instrument used to measure a surface's profile, in order to quantify its roughness & the thickness of thin film samples. Critical dimensions as step, curvature, flatness are computed from the surface topography.A typical profilometer can measure small vertical features ranging in height from 10 nanometres to 1 millimetre. The height position of the diamond stylus generates an analog signal which is converted into a digital signal, stored, analyzed, and displayed. The radius of diamond stylus ranges from 20 nanometres to 50 μm, and the horizontal resolution is controlled by the scan speed and data signal sampling rate. The stylus tracking force can range from less than 1 to 50 milligrams. For more details please follow the link


Alpha -Step D-600

Working Principle

A diamond stylus is moved vertically in contact with a sample and then moved laterally across the sample for a specified distance and specified contact force.The profilometer can measure small surface variations in vertical stylus displacement as a function of position.

Technical specification

  • Zooming range 4x (Max)
  • Sample size: From 4x4 to 150x150 mm.
  • Step Height: Nanometers to 1200 μm
  • Low Force: 0.03 to 15mg
  • Software: User friendly software interface
  • Compact Size: Small system footprint
  • Substrate thickness: From 0 to 4 mm.


  • For checking the uniformity & roughness of the surface of the sample.
  • To check the deposition profile of 2D devices.

Contact Person

Dr. Atindra Nath
Ms. Taniya
Ms. Soumili Dutta- email